Last update: Sun Oct 15 02:05:00 MDT 2017
@Article{Elko:2005:CMM,
author = "Gary W. Elko and Flavio Pardo and Daniel L{\'o}pez and
David Bishop and Peter Gammel",
title = "Capacitive {MEMS} microphones",
journal = j-BELL-LABS-TECH-J,
volume = "10",
number = "3",
pages = "187--198",
month = "Autumn",
year = "2005",
CODEN = "BLTJFD",
DOI = "https://doi.org/10.1002/bltj.20113",
ISSN = "1089-7089 (print), 1538-7305 (electronic)",
ISSN-L = "1089-7089",
bibdate = "Fri Nov 26 17:31:36 MST 2010",
bibsource = "http://www.math.utah.edu/pub/tex/bib/bstj2000.bib",
acknowledgement = ack-nhfb,
fjournal = "Bell Labs Technical Journal",
journal-URL = "http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)1538-7305/issues/",
onlinedate = "17 Nov 2005",
}