Entry Nasr:1992:IDR from dectechj.bib

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BibTeX entry

@Article{Nasr:1992:IDR,
  author =       "Mary Beth Nasr and Ellen J. Mager",
  title =        "Implementation of Defect Reduction Strategies into
                 {VLSI} Manufacturing",
  journal =      j-DEC-TECH-J,
  volume =       "4",
  number =       "2",
  pages =        "73--82",
  month =        "Spring",
  year =         "1992",
  CODEN =        "DTJOEL",
  ISSN =         "0898-901X",
  bibdate =      "Thu Mar 20 18:15:43 MST 1997",
  bibsource =    "http://www.math.utah.edu/pub/tex/bib/dectechj.bib;
                 UnCover library database",
  abstract =     "CMOS-4 technology combines a high-performance
                 microprocessor with a fast, dense RAM. Consistently
                 obtaining a specified die yield on CMOS-4 devices
                 required the implementation of a series of defect
                 reduction procedures. To achieve high yields,
                 microcontamination and defect reduction plans needed to
                 be in place well before initiation of product
                 manufacturing. Levels of overall cleanliness had to be
                 specified and controlled. Process equipment was
                 monitored at the new particle level of 0.375 mu m and
                 greater to collect data. Defect density test reticles
                 were designed and wafers were processed. Electrical
                 results were then incorporated into a yield model and
                 used to prioritize yield enhancement activities.
                 Experiments were designed to reduce the defect levels
                 of process areas, such as p-gate leakage and metal two
                 short circuits.",
  acknowledgement = ack-nhfb,
  classcodes =   "B2570D (CMOS integrated circuits); B2220C (General
                 fabrication techniques)",
  classification = "B2220C (General fabrication techniques); B2570D
                 (CMOS integrated circuits)",
  keywords =     "Cleanliness; cleanliness; CMOS integrated circuits;
                 defect reduction strategies; Defect reduction
                 strategies; high-; High-performance; integrated circuit
                 manufacture; microprocessor; Microprocessor;
                 microprocessor chips; performance; VLSI; VLSI
                 manufacturing",
  thesaurus =    "CMOS integrated circuits; Integrated circuit
                 manufacture; Microprocessor chips; VLSI",
  treatment =    "P Practical",
}

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