Entry Nasr:1992:CTF from dectechj.bib
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BibTeX entry
@Article{Nasr:1992:CTF,
author = "Andre I. Nasr and Gregory J. Grula and Antonio C.
Berti and R. D. Jones",
title = "{CMOS}-4 technology for fast logic and dense on-chip
memory",
journal = j-DEC-TECH-J,
volume = "4",
number = "2",
pages = "39--50",
month = "Spring",
year = "1992",
CODEN = "DTJOEL",
ISSN = "0898-901X",
bibdate = "Thu Mar 20 18:15:43 MST 1997",
bibsource = "http://www.math.utah.edu/pub/tex/bib/dectechj.bib;
UnCover library database",
abstract = "Digital's fourth-generation CMOS technology has
produced the industry's highest performance
microprocessors. The NVAX and Alpha 21064 chips are
based on 0.75- mu m, 3.3-V CMOS technology capable of
producing operating frequencies of up to 100 MHz and
200 MHz respectively. The high-performance CMOS
transistors consist of a 105-AA gate oxide, symmetric
n+ and p+ doped polysilicon for surface channel
conduction, low threshold voltage, and good turn-off
characteristics. The transistor has an on-wafer
electrical gate length of 0.5 mu m, a shallow medium
doped drain junction for hot electron immunity, a
CoSi/sub 2/ salicided gate, and source and drain
regions for low interconnect sheet resistance. A
TiN/CoSi/sub 2/ local interconnect scheme was used to
strap the drain and gate regions to form a
six-transistor memory cell with an area equivalent to
100 mu m/sup 2/.",
acknowledgement = ack-nhfb,
classcodes = "B1265F (Microprocessors and microcomputers); B2570D
(CMOS integrated circuits); C5130 (Microprocessor
chips)",
classification = "B1265F (Microprocessors and microcomputers); B2570D
(CMOS integrated circuits); C5130 (Microprocessor
chips)",
keywords = "100 MHz; 200 MHz; 21064; Alpha; Alpha 21064; chips;
CMOS integrated circuits; CMOS technology; CMOS
transistors; digital computers; Fast logic; fast logic;
low; Low threshold voltage; microprocessor;
Microprocessors; microprocessors; NVAX; surface channel
conduction; Surface channel conduction; threshold
voltage",
numericalindex = "Frequency 1.0E+08 Hz; Frequency 2.0E+08 Hz",
thesaurus = "CMOS integrated circuits; Digital computers;
Microprocessor chips",
treatment = "P Practical",
}
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7(1)43,
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3(3)27,
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4(2)51,
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4(3)38,
4(3)60,
4(3)73,
4(4)66,
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7(1)43,
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4(1)40,
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7(2)20,
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7(4)76,
8(2)83
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4(4)82,
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8(4)61
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4(2)12,
4(2)25,
4(2)100,
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4(4)35,
7(1)100
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1(9)16,
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2(2)73,
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2(4)43,
2(4)102,
2(4)118,
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3(1)58,
3(1)79,
3(2)31,
3(3)1,
3(3)78,
4(1)68,
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4(2)51,
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4(2)114,
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4(4)181,
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2(4)43,
2(4)130,
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3(1)58,
3(1)79,
3(2)19,
3(3)36,
3(4)9,
3(4)55,
3(4)61,
4(1)31,
4(1)68,
4(2)25,
4(2)51,
4(2)73,
4(2)114,
4(3)24,
4(3)38,
4(3)47,
4(3)73,
4(3)82,
4(4)111,
4(4)153,
4(4)181,
4(4)193,
5(1)1,
5(1)21,
5(1)34,
5(1)70,
5(1)99,
5(1)117,
5(1)130,
5(2)65,
5(2)77,
5(3)63,
6(2)49,
6(2)62,
6(3)8,
6(3)29,
7(1)43,
7(1)77,
7(1)100,
7(1)136,
7(2)56,
7(3)24,
7(3)39,
7(3)50,
7(4)34,
7(4)89,
8(1)5,
8(1)32,
8(2)5,
8(2)46,
8(2)72,
8(2)117