Entry Nasr:1992:CTF from dectechj.bib

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BibTeX entry

@Article{Nasr:1992:CTF,
  author =       "Andre I. Nasr and Gregory J. Grula and Antonio C.
                 Berti and R. D. Jones",
  title =        "{CMOS}-4 technology for fast logic and dense on-chip
                 memory",
  journal =      j-DEC-TECH-J,
  volume =       "4",
  number =       "2",
  pages =        "39--50",
  month =        "Spring",
  year =         "1992",
  CODEN =        "DTJOEL",
  ISSN =         "0898-901X",
  bibdate =      "Thu Mar 20 18:15:43 MST 1997",
  bibsource =    "http://www.math.utah.edu/pub/tex/bib/dectechj.bib;
                 UnCover library database",
  abstract =     "Digital's fourth-generation CMOS technology has
                 produced the industry's highest performance
                 microprocessors. The NVAX and Alpha 21064 chips are
                 based on 0.75- mu m, 3.3-V CMOS technology capable of
                 producing operating frequencies of up to 100 MHz and
                 200 MHz respectively. The high-performance CMOS
                 transistors consist of a 105-AA gate oxide, symmetric
                 n+ and p+ doped polysilicon for surface channel
                 conduction, low threshold voltage, and good turn-off
                 characteristics. The transistor has an on-wafer
                 electrical gate length of 0.5 mu m, a shallow medium
                 doped drain junction for hot electron immunity, a
                 CoSi/sub 2/ salicided gate, and source and drain
                 regions for low interconnect sheet resistance. A
                 TiN/CoSi/sub 2/ local interconnect scheme was used to
                 strap the drain and gate regions to form a
                 six-transistor memory cell with an area equivalent to
                 100 mu m/sup 2/.",
  acknowledgement = ack-nhfb,
  classcodes =   "B1265F (Microprocessors and microcomputers); B2570D
                 (CMOS integrated circuits); C5130 (Microprocessor
                 chips)",
  classification = "B1265F (Microprocessors and microcomputers); B2570D
                 (CMOS integrated circuits); C5130 (Microprocessor
                 chips)",
  keywords =     "100 MHz; 200 MHz; 21064; Alpha; Alpha 21064; chips;
                 CMOS integrated circuits; CMOS technology; CMOS
                 transistors; digital computers; Fast logic; fast logic;
                 low; Low threshold voltage; microprocessor;
                 Microprocessors; microprocessors; NVAX; surface channel
                 conduction; Surface channel conduction; threshold
                 voltage",
  numericalindex = "Frequency 1.0E+08 Hz; Frequency 2.0E+08 Hz",
  thesaurus =    "CMOS integrated circuits; Digital computers;
                 Microprocessor chips",
  treatment =    "P Practical",
}

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